Chemically Sensitive Tomography at 50 nm Spatial Resolution using a Soft X- ray Scanning Transmission X-Ray Microscope
نویسندگان
چکیده
Previous very successful soft X-ray microscopy tomography experiments [1-3] have been performed at a single photon energy. They have provided high spatial resolution, density based 3D images, but with only limited chemical information. We are developing computed angle-scan tomography in a scanning transmission x-ray microscope (STXM) for chemical visualization of a 3D spatial volume. Our goal is not only to do x-ray tomography at ~50 nm spatial resolution, but also to utilize the capability of STXM to perform energy scanning at high spectral resolution in order to identify and quantitatively map the chemical composition of the sample in a 3D volume.
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